JPH0518899B2 - - Google Patents

Info

Publication number
JPH0518899B2
JPH0518899B2 JP61277698A JP27769886A JPH0518899B2 JP H0518899 B2 JPH0518899 B2 JP H0518899B2 JP 61277698 A JP61277698 A JP 61277698A JP 27769886 A JP27769886 A JP 27769886A JP H0518899 B2 JPH0518899 B2 JP H0518899B2
Authority
JP
Japan
Prior art keywords
target material
film
present
weight
alloy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61277698A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63130769A (ja
Inventor
Tooru Degawa
Susumu Matsui
Yoshisato Nagashima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Engineering and Shipbuilding Co Ltd
Original Assignee
Mitsui Engineering and Shipbuilding Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Engineering and Shipbuilding Co Ltd filed Critical Mitsui Engineering and Shipbuilding Co Ltd
Priority to JP27769886A priority Critical patent/JPS63130769A/ja
Publication of JPS63130769A publication Critical patent/JPS63130769A/ja
Publication of JPH0518899B2 publication Critical patent/JPH0518899B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP27769886A 1986-11-20 1986-11-20 ターゲット材 Granted JPS63130769A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27769886A JPS63130769A (ja) 1986-11-20 1986-11-20 ターゲット材

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27769886A JPS63130769A (ja) 1986-11-20 1986-11-20 ターゲット材

Publications (2)

Publication Number Publication Date
JPS63130769A JPS63130769A (ja) 1988-06-02
JPH0518899B2 true JPH0518899B2 (en]) 1993-03-15

Family

ID=17587060

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27769886A Granted JPS63130769A (ja) 1986-11-20 1986-11-20 ターゲット材

Country Status (1)

Country Link
JP (1) JPS63130769A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002069625A (ja) * 2000-09-01 2002-03-08 Mitsui Mining & Smelting Co Ltd スパッタリングターゲットの製造方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4127792C1 (en]) * 1991-08-22 1992-08-06 W.C. Heraeus Gmbh, 6450 Hanau, De
SG11201401081UA (en) * 2012-01-25 2014-08-28 Jx Nippon Mining & Metals Corp Ferromagnetic material sputtering target

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6191336A (ja) * 1984-10-09 1986-05-09 Mitsubishi Metal Corp 合金タ−ゲツト材の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002069625A (ja) * 2000-09-01 2002-03-08 Mitsui Mining & Smelting Co Ltd スパッタリングターゲットの製造方法

Also Published As

Publication number Publication date
JPS63130769A (ja) 1988-06-02

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